JPH0462332B2 - - Google Patents
Info
- Publication number
- JPH0462332B2 JPH0462332B2 JP7679285A JP7679285A JPH0462332B2 JP H0462332 B2 JPH0462332 B2 JP H0462332B2 JP 7679285 A JP7679285 A JP 7679285A JP 7679285 A JP7679285 A JP 7679285A JP H0462332 B2 JPH0462332 B2 JP H0462332B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- inspection
- reflected light
- amount
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 17
- 230000007547 defect Effects 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 description 9
- 238000001514 detection method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Closed-Circuit Television Systems (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7679285A JPS61235740A (ja) | 1985-04-12 | 1985-04-12 | 表面欠陥検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7679285A JPS61235740A (ja) | 1985-04-12 | 1985-04-12 | 表面欠陥検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61235740A JPS61235740A (ja) | 1986-10-21 |
| JPH0462332B2 true JPH0462332B2 (en]) | 1992-10-06 |
Family
ID=13615474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7679285A Granted JPS61235740A (ja) | 1985-04-12 | 1985-04-12 | 表面欠陥検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61235740A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0212646U (en]) * | 1988-07-06 | 1990-01-26 |
-
1985
- 1985-04-12 JP JP7679285A patent/JPS61235740A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61235740A (ja) | 1986-10-21 |
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